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Plasma etching :

Additional authors: edt -- Manos, Dennis M.

Series: Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm Published by : Academic Press, (Boston [etc.] : ) , 1989 Physical details: XII, 476 str. : ilustr. ; 24 cm. ISBN:0124693709.

Subject(s): materials interactions

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Item type	Current location	Collection	Call number	Copy number	Status	Date due
Knjiga	Knjižnica Instituta Ruđer Bošković 1. krilo	Zbirka znanstvene literature	02.52/191 (Browse shelf)	28803	Available

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Previous	02.52/19 Udarnosžataja plazma v moščnyh impul'snyh razrjadah /	02.52/190/2 Plasma physics and controlled nuclear fusion research 1988.	02.52/190/3 Plasma physics and controlled nuclear fusion research 1988 :	02.52/191 Plasma etching :	02.52/192/1 Plasma diagnostics :	02.52/192/2 Plasma diagnostic :	02.52/193 Atomy v astrofizike /	Next

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