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Plasma etching :

Additional authors: edt -- Manos, Dennis M.
Series: Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm Published by : Academic Press, (Boston [etc.] : ) , 1989 Physical details: XII, 476 str. : ilustr. ; 24 cm. ISBN:0124693709.
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Item type Current location Collection Call number Copy number Status Date due
Knjiga Knjiga Knjižnica Instituta Ruđer Bošković
1. krilo
Zbirka znanstvene literature 02.52/191 (Browse shelf) 28803 Available

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